[17a-E11-1~5] 15.7 Fundamentals of epitaxy

[17a-E11-1] Formation of Defect-free Epitaxial Alumina Substrate by Stress Release

^○Michiko Yoshitake¹, Sinhiro Yagyu¹, Toyohiro Chikyow¹ (NIMS¹)

Keywords:格子ミスマッチ,拡散,FIB加工