The 61st JSAP Spring Meeting, 2014

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Oral presentation

12. Organic Molecules and Bioelectronics » 12.7 Medical engineering and biochips

[17a-E14-1~10] 12.7 Medical engineering and biochips

Mon. Mar 17, 2014 9:00 AM - 11:45 AM E14 (E302)

11:15 AM - 11:30 AM

[17a-E14-9] Estimation of diaphragm deformation induced by molecular adsorption on a MEMS optical interferometric biosensor

○Kazuhiro Takahashi1,2, Ryo Ozawa1, Makoto Ishida1, Kazuaki Sawada1,2 (Toyohashi Univ. of Tech1, JST-CREST2)

Keywords:MEMS,biosensor