[17a-E2-1~56] 17.0 Nanocarbon Technology (Poster)

[17a-E2-52] Study of carbon nanotube interconnects with low resistivity for future LSIs

^○Makoto Takahashi¹, Haruhisa Nakano¹, Bo Zhou¹, Akiko I¹, Daiyu Kondo¹, Katsunori Yagi¹, Naoki Harada¹, Shintaro Sato¹, Naoki Yokoyama¹ (AIST¹)

Keywords:カーボン配線,カーボンナノチューブ,ＧＮＣ