A Metallic Complex Reaction Etching of Transition Metal by Low-temperature and Damage-free Neutral Beam Process

Presentation information

Short Oral presentation

10. Spintronics and Magnetics » 10.2 Spin torque, spin current, circuits, and measurement technologies

Mon. Mar 17, 2014 10:26 AM - 11:06 AM E7 (E201)

ポスター講演　1:30PM～3:30PM　PA（アリーナ）

11:02 AM - 11:04 AM

^○Xun Gu¹, Yoshiyuki Kikuchi^1,2, Toshihisa Nozawa¹, Seiji Samukawa² (Tokyo Electron Limited¹, Tohoku Univ.²)

Keywords:中性粒子ビーム,遷移金属エッチング,錯体化反応