Development and Evaluation of Beam Characterizations for a CW Type Atomic-oxygen Source

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.8 New beam-application technologies

Mon. Mar 17, 2014 11:15 AM - 12:45 PM F3 (F301)

12:15 PM - 12:30 PM

^○（D）Yasuyoshi Hisamoto¹, Kazutaka Nishiyama², Masahito Tagawa³, Hitoshi Kuninaka² (Sokendai¹, JAXA², Kobe Univ.³)

Keywords:原子状酸素源