Surface fluoridation of DLC film with CF4-GCIB

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.5 Particle/photon-beam-induced surface reactions

Mon. Mar 17, 2014 9:00 AM - 11:00 AM F3 (F301)

10:00 AM - 10:15 AM

^○Asahi Kimura¹, Masahiro Hayashi¹, Noriaki Toyoda¹, Isao Yamada¹ (Univ. of Hyogo¹)

Keywords:クラスター,DLC,フッ化