[17a-F3-1~6] 7.5 Particle/photon-beam-induced surface reactions

[17a-F3-5] Collision Energy Dependence on the Oxidation Process of Si-atoms in DLC by the Hyperthermal O-atom Beam Exposures

^○Kumiko Yokota¹, Masahito Tagawa¹, Akitaka Yoshigoe², Yuden Teraoka² (Kobe Univ.¹, JAEA²)

Keywords:原子状酸素