[17a-F4-1~11] 7.6 Ion beams

[17a-F4-3] c-axis normal oriented rare earth GaN thin films grown by ion beam assisted deposition

^○Masashi Suzuki¹, Takahiko Yanagitani¹ (Nagoya Inst. Tech.¹)

Keywords:圧電,GaN薄膜,イオンビームアシスト成膜法