The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17a-F4-1~11] 7.6 Ion beams

Mon. Mar 17, 2014 9:30 AM - 12:30 PM F4 (F304)

11:15 AM - 11:30 AM

[17a-F4-7] Development of a Vacuum-Electrospray Ionic-liquid Beam Source for SIMS

○Yukio Fujiwara1, Naoki Saito1 (AIST1)

Keywords:イオン液体,エレクトロスプレー,二次イオン質量分析