The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17a-F4-1~11] 7.6 Ion beams

Mon. Mar 17, 2014 9:30 AM - 12:30 PM F4 (F304)

11:45 AM - 12:00 PM

[17a-F4-9] Improvement of mass resolution in TOF-SIMS with two-step extraction

○Satoru Nagashima1, Tetsuo Sakamoto2, Takaki Sato3, Masaaki Fujii3 (TOYAMA Co.1, Kogakuin Univ.2, Tokyo Tech.3)

Keywords:TOF-SIMS