[17a-PA4-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PA4-10] Passivation quality of AlO_x film deposited by sputtering method

^○Keigo Ueda¹, Haruhiko Yoshida^1,3, Koji Arafune^1,3, Atsushi Ogura^2,3, Shin-ichi Satoh^1,3 (Univ. of Hyogo¹, Meiji Univ.², JST-CREST³)

Keywords:太陽電池,スパッタ,パッシベーション