[17a-PA4-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PA4-15] Fabrication of Overdoze of hydrogen to a-Si:H Film by “Ion Beam Assist Method”

^○Kazuki Miyama¹, Justin Ndagijimana¹, Seiya Matsukawa¹, Hiroshi Kubota¹, Masao Yoshioka², Satoshi Yokoyama² (Graduate school of Science and Technology Kumamoto Univ.¹, Faculty of Technology Kumamoto Univ.²)

Keywords:シリコン系太陽電池,a-Si:H,Ion Beam