Establishment of Ohmic Contact Formation by Laser Annealing

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Mon. Mar 17, 2014 9:30 AM - 11:30 AM PG3 (G棟2階)

9:30 AM - 11:30 AM

^○Takaaki Tominaga¹, Hiroaki Okabe¹, Yosuke Nakanishi¹, Kazuyuki Sugahara¹, Nobuyuki Tomita¹, Satoshi Yamakawa¹ (Mitsubishi Electric Corp.¹)

Keywords:SiC,laser