Effects of crystal polarity on step bunching behavior of off-axis 4H-SiC solution growth

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Mon. Mar 17, 2014 9:30 AM - 11:30 AM PG3 (G棟2階)

9:30 AM - 11:30 AM

^○Shota Endo¹, Kazuhito Kamei^1,2, Yutaka Kishida², Koji Moriguchi² (Tohoku Univ. Environmental Studies¹, Nippon Steel Sumitomo Metal²)

Keywords:SiC,溶液成長,ステップバンチング