[17a-PG3-1~15] 15.6 IV-group-based compounds

[17a-PG3-7] Molecular Dynamics study on oxidation processes on 4H-SiC(0001) and (000-1) surfaces

^○（PC）Hiroshi Koyama^1,2, Takahiro Yamasaki^1,2, Jun Nara^1,2, Tatsuo Schimizu³, Takahisa Ohno^1,2,4 (NIMS¹, MARCEED², Toshiba³, IIS Univ. Tokyo⁴)

Keywords:SiC,理論計算,酸化過程