The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

11. Superconductivity » 11.5 Junction, circuit fabrication process and digital applications

[17p-D4-1~13] 11.5 Junction, circuit fabrication process and digital applications

Mon. Mar 17, 2014 2:00 PM - 5:30 PM D4 (D115)

4:45 PM - 5:00 PM

[17p-D4-11] Fabrication of NbTiN/AlNx/NbTiN junctions towards high-temperature operation of Single-flux-quantum circuits

○(M1)Shunya Sakamoto1, Hiroyuki Akaike1, Akira Fujimaki1 (Nagoya Univ.1)

Keywords:NbTiN,SFQ,NbN