The 61st JSAP Spring Meeting, 2014

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Oral presentation

17. Nanocarbon Technology » 17.2 Structural control and process

[17p-D5-1~8] 17.2 Structural control and process

Mon. Mar 17, 2014 4:00 PM - 6:00 PM D5 (D207)

5:00 PM - 5:15 PM

[17p-D5-5] Graphene growth by microwave surface wave plasma CVD and method of removing excess carbon films

○Susumu Ichimura1,2, Hideo Uchida1, Koichi Wakita1, Yasuhiko Hayashi2, Masayoshi Umeno1 (Chubu Univ.1, Okayama Univ.2)

Keywords:Graphene,マイクロ波表面波プラズマCVD,超音波