[17p-D5-1~8] 17.2 Structural control and process

△ [17p-D5-7] Graphene dots fabrication by a bio-template and a neutral beam etching

^○Koki Igarashi¹, Takeru Okada¹, Su Ching-Yuan², Huang Chi-Hshien³, Patrick Han⁴, Katsuaki Sugawara⁴, Taro Hiotosugi⁴, Takashi Takahasi⁴, Seiji Samukawa^1,4 (IFS, Tohoku Univ.¹, National Central University², Ming Chi University of Technology³, WPI-AIMR, Tohoku Univ.⁴)

Keywords:graphene,neutral beam