[17p-D6-1~11] 6.2 Carbon-based thin films

△ [17p-D6-11] Electrical properties and chemical bonding structures of boron-doped ultrananocrys-talline diamond films prepared by coaxial arc plasma deposition

^○Yuki Katamune¹, Shinya Ohmagari², Hiroyuki Setoyama³, Tsuyoshi Yoshitake¹ (Kyushu Univ.¹, AIST², Kyushu Synchrotron Light Research Center³)

Keywords:超ナノ微結晶ダイヤモンド