[17p-D9-1~13] Recent status of crystalline silicon solar cells

[17p-D9-6] Development of large area plasma CVD equipment for mono crystal silicon solar cell which used the low inductance antenna (LIA)

^○Yoshio Sugimoto¹, Atsushi Osawa¹, Noritaka Yoneyama¹, Motohiro Kohon¹, Akinori Ebe², yuuichi Setsuhara³ (screen¹, EMD², osaka Univ.³)

Keywords:太陽電池　,solar cell,プラズマ