The 61st JSAP Spring Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17p-E10-1~10] Nanocarbon Technology

Mon. Mar 17, 2014 1:15 PM - 3:45 PM E10 (E204)

2:15 PM - 2:30 PM

[17p-E10-5] Fabrication and properties of SnOx thin films grown by mist CVD

○Takayuki Uchida1, Toshiyuki Kawaharamura2, Shizuo Fujita1 (Graduate School of Eng., Kyoto Univ.1, Inst. for Nanotechnology, Kochi Univ. of Tech.2)

Keywords:酸化スズ,ミストCVD