The 61st JSAP Spring Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17p-E10-1~10] Nanocarbon Technology

Mon. Mar 17, 2014 1:15 PM - 3:45 PM E10 (E204)

2:30 PM - 2:45 PM

[17p-E10-6] MOCVD deposition of NiO films using bis(2,4-pentanedionato)nickel(II) hydrate as precursor

○Kai Taniguchi1, Mizuki Teramura1, Hiroyasu Ishikawa1 (Shibaura Inst. of Tech.1)

Keywords:NiO,MOCVD,ニッケル水和物