The 61st JSAP Spring Meeting, 2014

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14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.2 Ultrathin films and quantum nanostructures

[17p-E15-1~15] 14.2 Ultrathin films and quantum nanostructures

Mon. Mar 17, 2014 1:15 PM - 5:30 PM E15 (E303)

4:15 PM - 4:30 PM

△ [17p-E15-11] Fabrication of InGaAs Quantum Nanodisk by Bio-template and Neutral Beam Etching

○Kenichi Yoshikawa1, ChangYong Lee1,4, Yosuke Tamura1,4, Akio Higo2, Cedric Thomas1,4, Ichiro Yamashita3,4, Seiji Samukawa1,2,4 (IFS, Tohoku Univ.1, WPI-AIMR, Tohoku Univ.2, NAIST3, JST-CREST4)

Keywords:InGaAs,量子ドット