[17p-E4-1~17] 3.4 Optical measurement

[17p-E4-16] Development of thin metal film thickness measurement technique by pico second ultrasonic measurement using super short pulse fiber laser

^○Toshiyuki Nakao¹, Masahiro Watanabe¹, Hidekazu Tezuka², Hideaki Sasazawa², Yasuhiro Yoshitake², Hirotsugu Ogi³ (Hitachi, Ltd¹, Hitachi High-Technologies Corporation², Osaka University³)

Keywords:超音波