The 61st JSAP Spring Meeting, 2014

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Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

Mon. Mar 17, 2014 2:00 PM - 6:15 PM F1 (F201)

5:45 PM - 6:00 PM

[17p-F1-15] Plasma treatment of Graphene for Atomic Layer Deposition

○Takeshi Kitajima1, Toshiki Nakano1 (Nat. Def. Acad.1)

Keywords:Graphene,原子層堆積,プラズマ修飾