[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

[17p-F1-16] Nitridation of silicon by nitrogen neutral beam

^○（PC）Yasuhiro Hara¹, Tomohiro Shimizu¹, Shoso Shingubara¹ (Kansai Univ.¹)

Keywords:シリコンの窒化,中性粒子ビーム