[17p-F2-1~17] 8.2 Plasma measurements and diagnostics

[17p-F2-3] Animation observation of the Two Discharge Modes on High-Vacuum Planar Magnetron Sputtering

^○Takahiro Ohno¹, Masatoshi Itoh¹, Yoshio Uhara¹, Tsutomu Miura¹, Shigeru Saito¹ (Tokyo University of Science¹)

Keywords:高真空平板マグネトロン