[17p-F2-1~17] 8.2 Plasma measurements and diagnostics

[17p-F2-7] Evaluation surface loss probability of Br radical in an inductively coupled HBr plasma

^○Yoshitaka Fujii¹, Daiki Iino¹, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, PLANT, Nagoya Univ.²)

Keywords:誘導結合型HBrプラズマ