[17p-F3-1~16] 8.1 Plasma production and control

[17p-F3-11] Investigation of Caluclating Method for Electric Potential Distribution in Ion-Source by Electron Fluid Model

^○Masaru Miyashita¹, Haruhiko Etoh¹, Yasushi Aoki¹, Takanori Kato¹ (SHI¹)

Keywords:プラズマモデリング,イオン源