[17p-F3-1~16] 8.1 Plasma production and control

△ [17p-F3-16] Control of Ionization Rates and Energy Distribution of Deposition Particles in Reactive Plasma Deposition Equipment

^○Hisashi Kitami¹, Masaru Mitashita¹, Toshiyuki Sakemi¹, Yasushi Aoki¹, Takanori Kato¹ (Sumitomo Heavy Industries, Ltd.¹)

Keywords:イオン化率定量分析,反応性プラズマ蒸着装置,透明導電膜