[17p-F3-1~16] 8.1 Plasma production and control

[17p-F3-2] Uniformity Evaluation of Microwave Meter-Scale Line Plasmas

^○Suguru Nakano¹, Haruka Suzuki¹, Hitoshi Itoh^2,3, Makoto Sekine^1,2, Masaru Hori^1,2, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, PLANT, Nagoya Univ.², Tokyo Electron Ltd.³)

Keywords:大気圧プラズマ,マイクロ波プラズマ