The 61st JSAP Spring Meeting, 2014

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Oral presentation

08. Plasma Electronics » 8.1 Plasma production and control

[17p-F3-1~16] 8.1 Plasma production and control

Mon. Mar 17, 2014 2:00 PM - 6:15 PM F3 (F301)

4:15 PM - 4:30 PM

△ [17p-F3-9] Energy distributions of particles striking on the cathode in Ar and He DC discharges simulated by PIC-MCC method

○Takahiro Kondo1, Tsuyohito Ito1 (Osaka Univ.1)

Keywords:PIC-MCC,エネルギー分布,中性粒子