The 61st JSAP Spring Meeting, 2014

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07. Beam Technology and Nanofabrication » 7.7 Vacuum nanoelectronics and electron sources

[17p-F5-1~15] 7.7 Vacuum nanoelectronics and electron sources

Mon. Mar 17, 2014 1:30 PM - 5:45 PM F5 (F305)

5:00 PM - 5:15 PM

▲ [17p-F5-13] Discharge Characteristics of Transfer Mold Amorphous Carbon Field Emitter Arrays for Plasma Source Applications

○Jonghyun Moon1, Masayuki Nakamoto1 (Graduate School of Eng., Shizuoka Univ.1)

Keywords:Transfer Mold field emitter arrays,amorphous carbon,discharge characteristics