[17p-F5-1~15] 7.7 Vacuum nanoelectronics and electron sources

[17p-F5-7] Seppen-Katamuki Analysis of Electron Emission Properties of Hafnium Nitride Field Emitter Arrays Operated at Room and Low Temperatures

^○Yasuhito Gotoh¹, Yoshiki Yasutomo¹, Hiroshi Tsuji¹ (Kyoto Univ.¹)

Keywords:フィールドエミッタアレイ,窒化ハフニウム,低温