The 61st JSAP Spring Meeting, 2014

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07. Beam Technology and Nanofabrication » 7.7 Vacuum nanoelectronics and electron sources

[17p-F5-1~15] 7.7 Vacuum nanoelectronics and electron sources

Mon. Mar 17, 2014 1:30 PM - 5:45 PM F5 (F305)

3:00 PM - 3:15 PM

[17p-F5-7] Seppen-Katamuki Analysis of Electron Emission Properties of Hafnium Nitride Field Emitter Arrays Operated at Room and Low Temperatures

○Yasuhito Gotoh1, Yoshiki Yasutomo1, Hiroshi Tsuji1 (Kyoto Univ.1)

Keywords:フィールドエミッタアレイ,窒化ハフニウム,低温