[17p-PA2-1~27] 5.0 Optoelectronics (Poster)

[17p-PA2-12] InAs/InAlGaAs Highly-Stacked Quantum Dot Intermixing by ICP-RIE Etching Technique for Low-Loss Optical Waveguides Aimed for Integration with SOA

^○（M2）Asuka Matsushita¹, Atsushi Matsumoto¹, Yuuki Takei¹, Kouichi Akahane², Yuichi Mastushima³, Katsuyuki Utaka¹ (Waseda Univ.¹, National Inst. of Information and Communications Tech.², GCS Research Organization³)

Keywords:量子ドット,組成拡散,集積化