[17p-PA2-1~27] 5.0 Optoelectronics (Poster)

[17p-PA2-13] Sidewall roughness analysis with 3D-AFM and CD-SEM tool

^○Naoki Hirayama^1,2, Masashi Yamagishi^1,2, Yoshiji Noguchi^1,2, Shigeru Saito^1,2, Hiroyuki Takahashi^1,3, Tsuyoshi Horikawa^1,2 (PECST¹, AIST², PETRA³)

Keywords:光導波路,Edge roughness,AFM