[17p-PG1-1~9] 6.1 Ferroelectric thin films

[17p-PG1-2] Investigation into the PZT thin films of polarization direction for the applications to the VEH

^○Yasuhiro Suzuki^1,2, Natumi Makimoto², Hiroshi Hunakubo³, Ryutaro Maeda², Takeshi Kobayashi² (Ibaraki Univ.¹, AIST², Tokyo Tech.³)

Keywords:エネルギーハーベスタ,PZT,MEMS