The 61st JSAP Spring Meeting, 2014

Presentation information

Poster presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[17p-PG1-1~9] 6.1 Ferroelectric thin films

Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG1 (G棟2階)

4:00 PM - 6:00 PM

[17p-PG1-6] Fabrication of Fe2O3 by Atomic Layer Deposition

○(M1C)Yu Tanaka1, Itaru Tanuma1, Hiroshi Sakama1 (Sophia University1)

Keywords:ALD