The 61st JSAP Spring Meeting, 2014

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Poster presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[17p-PG1-1~9] 6.1 Ferroelectric thin films

Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG1 (G棟2階)

4:00 PM - 6:00 PM

[17p-PG1-8] Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation

○Kazuki Watanabe1, Masaki Yamaguchi1, Hiroyuki Nishikawa1 (Shibaura Inst. of Tech.1)

Keywords:強誘電体薄膜,微細加工,プロトンビーム