4:00 PM - 6:00 PM
[17p-PG1-8] Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation
Keywords:強誘電体薄膜,微細加工,プロトンビーム
Poster presentation
06. Thin Films and Surfaces » 6.1 Ferroelectric thin films
Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG1 (G棟2階)
4:00 PM - 6:00 PM
Keywords:強誘電体薄膜,微細加工,プロトンビーム