The 61st JSAP Spring Meeting, 2014

Presentation information

Poster presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[17p-PG2-1~23] 6.3 Oxide-based electronics

Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG2 (G棟2階)

4:00 PM - 6:00 PM

[17p-PG2-6] Microstructure of sputtered-NiO films and their impacts on electrical properties

Tatsuya Iwata1, Yusuke Nishi1, Tsunenobu Kimoto1 (Kyoto Univ.1)

Keywords:酸化ニッケル,スパッタリング