4:00 PM - 6:00 PM
[17p-PG3-26] Fabrication of submicron scale device structures of a-IGZO using RIE
Keywords:酸化物半導体
Presentation information
Poster presentation
Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology
[17p-PG3-1~30] Nanocarbon Technology
Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)