The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[18a-D10-1~13] 6.1 Ferroelectric thin films

Tue. Mar 18, 2014 9:00 AM - 12:30 PM D10 (D316)

9:00 AM - 9:15 AM

[18a-D10-1] The Wet Etching Technique of KNN films by EDTA

○Fumimasa Horikiri1, Kenji Shibata1, Kazufumi Suenaga1, Kazutoshi Watanabe1, Masaki Noguchi1 (Hitachi Metals, Ltd.1)

Keywords:圧電,ウエットエッチング,非鉛