[18a-D10-1~13] 6.1 Ferroelectric thin films

[18a-D10-4] Characterization of piezoelectric property in (100)/(001)-oriented tetragonal Pb(Zr,Ti)O3 films with controlled volume fraction of (001) orientation

^○Naoya Oshima¹, Yoshitaka Ehara¹, Takahiro Oikawa¹, Hiroshi Uchida², Hiroshi Funakubo¹ (Tokyo Institute of Technology¹, Sophia University²)

Keywords:薄膜,圧電材料