[18a-D3-1~14] 15.1 Bulk crystal growth

▲ [18a-D3-12] Numerical Investigation of the Melting Process Including Carbon Contamination in a CZ-Si Crystal Growth

^○Xin Liu¹, Bing Gao¹, Satoshi Nakano¹, Koichi Kakimoto¹ (RIAM, Kyushu Univ.¹)

Keywords:単結晶