[18a-D5-1~11] 11.4 Analog application and its related technologies

[18a-D5-11] Fabrication of Nb/Al Superconducting tunnel junction by using ozone (O3) gas

^○masahiro ukibe¹, go fujii¹, masataka ohkubo¹ (AIST¹)

Keywords:　Nb/Al アレイ素子,X線検出器,高エネルギー分解能