[18a-D6-1~11] 6.2 Carbon-based thin films

[18a-D6-1] High-crystalline quality AlN growth on diamond (111) substrates by metal-organic vapor phase epitaxy

^○Masataka Imura¹, Jiangwei Liu¹, Meiyong Liao¹, Yasuo Koide¹ (NIMS¹)

Keywords:ダイヤモンド,窒化アルミニウム