[18a-D6-1~11] 6.2 Carbon-based thin films

△ [18a-D6-3] Long Time Growth of the Heteroepitaxial Diamond by Direct Current Plasma CVD Apparatus with Heated Cathode

^○Hitomi Ikeda¹, Kimiyoshi Ichikawa¹, Hideyuki Kodama¹, Kazuhiro Suzuki², Shozo Kono¹, Atsuhito Sawabe¹ (Aoyama Gakuin Univ.¹, TOPLAS ENGINEERING²)

Keywords:ダイヤモンド,プラズマCVD