The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18a-D6-1~11] 6.2 Carbon-based thin films

Tue. Mar 18, 2014 9:00 AM - 12:15 PM D6 (D209)

10:30 AM - 10:45 AM

[18a-D6-7] Phosphorus doping efficiency in n-type CVD diamond thin films

○（PC）Ryota Ohtani1, Takashi Yamamoto1, Satoshi Koizumi1,3, Satoshi Yamasaki2,3 (NIMS1, AIST2, JST-CREST3)

Keywords:ダイヤモンド,CVD